Lateral Implant Straggle : Lateral Implant Straggle

Requires: SSuprem 4, MC IMPLANT
Minimum Versions: Athena 5.21.2.R

This example compares analytical methods for simulation of 2D implantation. It also shows how to use Monte Carlo simulation for estimation of spatial moments.

In the first part, Monte Carlo simulation is used to save a structure with spatial moments. Only 20000 trajectories is enough to estimate the moments.

In the second part, all 8 spatial moments are extracted. Then, the default and FULL.LAT model are used to simulate 2D implant into the 0.2 microns mask window. The default method uses only 5 spatial moments, and lateral distribution is Gaussian with standard deviation independent from the vertical coordinate. FULL.LAT model uses 8 spatial moments and lateral distribution is a symmetrical Pearson function with standard deviation varying as a parabolic function of the vertical coordinate. In general, lateral kurtosis should also depend on the vertical coordinate, however the simplified approach with constant kurtosis slightly smaller than the averaged fourth lateral moment KURTT is used. Obtained 2D profiles are overlaid in TonyPlot.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.