User-Defined MOMENTs with Parameters from MC Simulation

aniiex07.in : User-Defined MOMENTs with Parameters from MC Simulation

Requires: SSuprem 4, MC IMPLANT
Minimum Versions: Athena 5.21.2.R

This example can be used as a template which allows us to estimate implant moments from Monte Carlo simulation and then use these moments in subsequent analytical implants. This approach is useful for those ion/material/energy combinations which are not included into look-up tables.

In the first part of the example, the Monte Carlo method is used to calculate moments for 70 keV boron in titanium silicide. Parameter PRINT.MOM specified in the IMPLANT statement allows Athena to save the calculated moments in the standard structure file aniiex07_01.str .

In the second part of the example, first the moments parameters for single Pearson distribution are extracted from the file. Then, the parameter substitution capability of DeckBuild is used to path these parameters to the MOMENTS statement. After that the moments set in the MOMENTS statement are used in the analytical implant. The parameter ANY.PEARSON is set to FALSE. This ensures that Pearson type-IV distribution will be used. Profiles obtained in Monte Carlo and analytical simulations are compared in TonyPlot.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.