Experimental Verification of Channeling Profiles

aniiex04.in : Experimental Verification of Channeling Profiles

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example compares zero-tilt boron implant profiles obtained using the SIMS Verified Dual Pearson ( SVDP ) method with experimental results (R.J. Shreutelkamp, et.al., Nucl.Instr. & Meth., B55, p.615, 1991) saved in *.exp files.

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