Use of SIMS Profile Model : Use of SIMS Profile Model

Requires: SSuprem 4, MC IMPLANT
Minimum Versions: Athena 5.21.0.A

This example demonstrates how to use the SIMS Profile Model.

In many cases 1D profiles obtained from tabulated range moments are not accurate and it is preferable to use measured SIMS profile instead. The SIMS Profile Model provides this capability. Athena will use SIMS profile stored in a file specified by parameter measured.sims when profile parameter present in the implant statement.

Another possibility is to generate SIMS-like profile using 1D Monte Carlo simulation and extract capability of DeckBuild. This capability is shown in the example. In the first part 1D profile of 200 keV boron profile is simulated using BCA Monte Carlo model and then extracted and saved in aniiex19.dat file. In the second part of the example, the 200 keV boron implantation through 1 micron mask window is simulated. The extracted profile aniiex19.dat is specified in the implant statement with parameter extract.sims . The final 2D distribution is not as accurate as the result of a full 2D Monte Carlo simulation but the SIMS Profile Model is obviously much faster.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.