Trench Filling and Planarization

anelex09.in : Trench Filling and Planarization

Requires: Elite
Minimum Versions: Athena 5.21.2.R

A simple trench filling, planarization, and etch back is demonstrated in this example. The initial trench profile was defined using the ETCH statement with a bottom critical dimension of 0.6 um and 87 degree sidewall slopes.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.