Microloading Effects

anelex05.in : Microloading Effects

Requires: Elite
Minimum Versions: Athena 5.21.2.R

The angular distributions obtained from the Monte Carlo simulation may be approximated by a Gaussian distribution overlaid by a strong peak at 0 degrees. Using such an approximation or using the original distribution obtained from the Monte-Carlo program for the calculation of local ion flux results in strawberry-shaped profiles. They have rounded bottoms and a barrel-like underetching in the upper part of the trenches. A microloading or proximity effect can be seen. Small feature sizes have a lesser etch rate than wide feature sizes. The maximum etch rate can only be reached in a distance from the mask feature that is large compared to the etch depth.

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