Ion Milling of Aluminum

anelex10.in : Ion Milling of Aluminum

Requires: Elite
Minimum Versions: Athena 5.21.2.R

This example demonstrates Athena/Elite ion milling using the RIE model. Ion milling shows a strong directional dependence. For this example, the incoming ion flux is vertical. This is modeled by using the RIE model with a directional component only. This results in a vertical penetration.

A machine called ionmill is defined and applied to the window structure. After each one minute etch, a structure file is saved. Following the last ion milling step, the structures are plotted sequentially.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.