Stress in FinFET due to capping layer : Stress in FinFET due to capping layer

Requires: Victory Process, Victory Stress
Minimum Versions:Victory Process 7.6.8.R, Victory Stress 2.4.8.R

This example is executed in two steps:

First, Victory Process is used to generate the FinFET structure out of specifications provided in a layout file. The 'line x|y|z..' statements are used to refine the mesh inside the FinFET structure in the area of the gate and the fin. At the end of the Victory Process simulation run the structure is exported with a tetrahedral volume mesh and is saved to the file 'vsex01_fine_victory_conformal_ex.str' which can be visualized with Tonyplot3d .

In the second part of the simulation deck stress analysis is performed by Victory Stress. The statement

go victorystress

starts the Victory Stress simulator. Than, the FinFET structure created in the first part of the simulation run is loaded with the Init statement.

The Material statement defines different elastic properties of the materials contained in the structure. Without those definitions, Victory Stress would load default values of these properties from an internal material database. The Material statement overrides those default values.

The Method statement chooses a particular linear equation system solver for solving the the system of elastic stress equations. In this case the solver called 'ams' is selected.

The stress analysis itself is a one-step simulation and it is started by the Stress statement. Note : Since it is not specified explictly in this examples, the default crystal orientations are applied, which means that a (100) silicon wafer is used and the fin is oriented in the <100> direction.

Once stress analysis simulation is complete the three-dimensional structure is saved with the Save statement and can be visualized using Tonyplot3d .

To load and run this example, select the Load example button in DeckBuild Examples window. This will copy the input file and any support files to your current working directory. Select the Run button to execute the example.