Aluminum Implant into 6H-SiC. : Aluminum Implant into 6H-SiC.

Requires: SSuprem 4, MC Implant
Minimum Versions: Athena 5.22.0.R

This example compares Monte Carlo simulation with experimental profiles for wide energy range implants in 6H-SiC. The details of corresponding experimental conditions can be found in J.M. Hernandez-Mangas J. Appl. Phys, Vol. 91, pp.658-667, 2002 (see Fig.16). Note, that Athena simulation results have better agreement with experiments than the specialized simulator used in the paper above.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.