Multi-level Interconnect Formation

anex05.in : Multi-level Interconnect Formation

Requires: SSuprem 4, Elite
Minimum Versions: Athena 5.21.2.R

This example shows the use of Elite to model a complete interconnect system over isolation oxide grown using SSuprem 4 .

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.