Metal Patterning Over Non-planar Topography

anex04.in : Metal Patterning Over Non-planar Topography

Requires: SSuprem 4, Elite, and Optolith
Minimum Versions: Athena 5.21.2.R

This example demonstrates optical lithography over non-planar topography. Optolith is invoked to expose and develop the photoresist.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.