Comparison of Simple and Realistic Resist Surfaces

anex03.in : Comparison of Simple and Realistic Resist Surfaces

Requires: Optolith
Minimum Versions: Athena 5.21.2.R

This example demonstrates optical lithography over non-planar topography. Optolith is invoked to expose and develop the photoresist.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.