Tuning LOCOS Shapes using the COMPRESS Model

ancaex04.in : Tuning LOCOS Shapes using the COMPRESS Model

Requires: SSuprem 4
Minimum Versions: Athena 5.18.0.R

This example shows a simple way of tuning the LOCOS bird's beak shape. It is known that the length and thickness of a bird's beak during LOCOS oxidation decreases with an increase of nitride thickness. This happens because thicker nitride produces higher stresses which decrease oxidation rates. A viscous stress-dependent oxidation model should be used to accurately predict this effect. However this model is very time consuming therefore one can use the compress model with higher Young's modulus for nitride in order to decrease bird's beak length. This example calculates LOCOS for two values of nitride Young modulus coefficient 3.89e12 dynes/cm^2 (default) and 3.89e14 dynes/cm^2. The values of Young's modulus are reverse proportional to the elastic constant s11.elast. Poisson's ratio stays unchanged because it is equal to -(s12.elast/s11.elast).

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.