Void Formation During Trench Oxidation

anoxex10.in : Void Formation During Trench Oxidation

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example demonstrates SSuprem 4's ability to oxidize when colliding oxide fronts cause a void. A narrow trench is oxidized until the opposing oxidation fronts touch. During the oxidation SSuprem 4 saves the structure after each time step. These saved structures as well as the final structure are used to monitor the moving boundary progress.

To watch the movie, first select "Select all plots" from the "View" popup and then select "Movie.." from the "Tools" popup.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.