Tilt Implant and Anneal on Irregular Mesh

amex04.in : Tilt Implant and Anneal on Irregular Mesh

Requires: SSuprem 4
Minimum Versions: Athena 5.21.2.R

This example shows the tilt implantation into a trench structure using adaptive gridding technique in SSuprem 4 .

The example begins with an initial grid structure. The METHOD ADAPT statement specifies the adaptive gridding option.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.