LOCOS Isolation Structure

amex03.in : LOCOS Isolation Structure

Requires: /SSuprem 4/Elite
Minimum Versions: Athena 5.21.2.R

This example shows the fabrication of a trench isolation structure using Elite and SSuprem 4 to model etching and oxidation processes. We test this as a nonplanar structure application for base mesh generation.

The example begins without a grid definition. The GRID.MODEL statement specifies a grid type LOCOS .

Finally, the structure is plotted using TonyPlot and the structure is saved to a file.

To load and run this example, select the Load example button. This action will copy all associated files to your current working directory. Select the DeckBuild run button to execute the example.